Professional, standard interview. They're looking more at the way of thinking; explaining your thought process is crucial. Communicating your ideas clearly is also highly relevant and would be beneficial.
What is your exposure to lithography?
The following metrics were computed from 2 interview experiences for the ASML Engineer role in Singapore.
ASML's interview process for their Engineer roles in Singapore is fairly selective, failing a large portion of engineers who go through it.
Candidates reported having very good feelings for ASML's Engineer interview process in Singapore.